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Description

The following is a list of standard nanofabrication processes that are approved for use in the LNF.

AB block copoly toluene
BMA-TMA-copoly Toluene
FDTS Heptane
Fluoropolymer Mold Fabrication
HSQ-MIBK
HumiSeal 1C51
HumiSeal 2A53 Part A
HumiSeal 2A53 Part B
Metalized PDMS (Sylgard 184) Diaphragm
mr-I 9030
Nanowires SOP
PBA Toluene
PBAEMA Toluene
PC Toluene
PCHA Toluene
PDDA Poly s-119
PMMA anisole solution used as nanoimprint resist
PDMAEMA Toluene
Phenethyltrichlorosilane (PETS)
Methacryloxypropyltrichlorosilane (MOPTS)
PMMA toluene
Poly(vinyl alcohol) Thin-Film Preparation
PS toluene
Rhodamine 6G
Spincoat PLGA in DMF for Imprint Lithography

Toluene
ZrO2 and Poly s-119
© 2011 Lurie Nanofabrication Facility, University of Michigan
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