Search: »
Welcome Guest, you are in | Login
<=Back to Materials Page

Description of Material

Silicon Nitride


A man made ceramic. Dark gray to black in appearance, and can be polished to a reflective surface.

  • High strength over a wide temperature range
  • High fracture toughness
  • High hardness
  • Outstanding wear resistance, both impingement and frictional modes
  • Good thermal shock resistance
  • Good chemical resistance
  • an electrical insulator

Processing Tools

Deposited by Enerjet Sputter Coater (300nm/1um) by Physical Vapor Deposition (PVD)


  • SiN is used to mask SiO2 and Si from oxidation.
  • Developed for automotive engine wear parts (ex. valves and cam followers) but never economically feasible.


1. "Silicon Nitride, Si3N4" Accuratus 2002
© 2011 Lurie Nanofabrication Facility, University of Michigan