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Description of Material

Silicon Nitride

Properties

A man made ceramic. Dark gray to black in appearance, and can be polished to a reflective surface.

  • High strength over a wide temperature range
  • High fracture toughness
  • High hardness
  • Outstanding wear resistance, both impingement and frictional modes
  • Good thermal shock resistance
  • Good chemical resistance
  • an electrical insulator

Processing Tools

Deposited by Enerjet Sputter Coater (300nm/1um) by Physical Vapor Deposition (PVD)

Applications

  • SiN is used to mask SiO2 and Si from oxidation.
  • Developed for automotive engine wear parts (ex. valves and cam followers) but never economically feasible.

Citations

1. "Silicon Nitride, Si3N4" Accuratus 2002 http://www.accuratus.com/silinit.html
© 2011 Lurie Nanofabrication Facility, University of Michigan
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