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SU-8 Series
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Modified on 08/15/2011 01:59 PM
by gulotty
Categorized as
Chemicals
,
Chemicals Photoresists
AP300 adhesion promoter
Chemicals
Manual Spinner
negative photoresist
Solitec Spinner
SU-8 Negative Resist and Developer Process
AP300 adhesion promoter
Chemicals
Manual Spinner
negative photoresist
Solitec Spinner
SU-8 Negative Resist and Developer Process
»
SU-8 Series (Public)
[X]
»
SU-8 Series (Public)
« Back to Chemicals Page
Description
¶
SU-8 series of
negative photoresist
.
The SU-8 Series
¶
Photoresist, (SU-8 2010)
Photoresist, (SU-8 5)
Process SOPs
¶
AP300 adhesion promoter
for adhesion promotion of SU-8 series onto wafers.
SU-8 Negative Resist and Developer Process
Equipment
¶
Manual Spinner
(
Solitec Spinner
only)
References/Data/MSDS
¶
see attachments
Name
Size
SU-82000DataSheet2025thru2075Ver4.pdf
306.05 KB
© 2011 Lurie Nanofabrication Facility, University of Michigan
