One of several Physical Vapor Deposition (PVD)
tools, similar in operation to Enerjet Evaporator
. Used for depositing insulators and optical materials (thickness.5um+) Designed for depositing when liftoff
- Used for metal and dielectric PVD.
- Fixturing Lift-off dome standard. One custom for high yield dielectric PVD.
- Substrate size:Fragments up to 4 inch.
- Maximum capacity: 6,4" wafers. plus 8,3" wafers.