<![CDATA[LNF Wiki - Page Updates]]>http://ssel-sched.eecs.umich.edu/wiki/Wed, 22 May 2013 06:09:34 GMTScrewTurn Wiki RSS Feed Generator<![CDATA[S5 T3 - Boron Diffusion 100mm only]]>http://ssel-sched.eecs.umich.edu/wiki/Public.S5 T3 - Boron Diffusion 100mm only.ashxZylema, Jacob <=Back to Equipment Page

Description

One of several tubes of the Tempress TS 6604 S5 furnace. This tube of the furnace is used to dope with Boron. To get access to this tool, log in to the LNF Online Data Services and create a ticket for the tool in the Scheduler application.

Tool Documents

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]]>Mon, 22 Apr 2013 16:44:18 GMT1D803E2A1AE121E3735DD6D396BBC7FB<![CDATA[S5 T1 - Phosphorous Diffusion 100mm only]]>http://ssel-sched.eecs.umich.edu/wiki/Public.S5 T1 - Phosphorous Diffusion 100mm only.ashxZylema, Jacob <=Back to Equipment Page

Description

A furnace tube used to drive in phosphorus for n-type doped wafers. One of several tubes of the Tempress TS 6604 S5. To get access to this tool, log in to the LNF Online Data Services and create a ticket for the tool in the Scheduler application.

Tool Documents

Google Docs




PDF

]]>Mon, 22 Apr 2013 16:42:37 GMT1DE30819C79E04801CB24064FB5E5B3A<![CDATA[A2, Boron-dope]]>http://ssel-sched.eecs.umich.edu/wiki/Public.A2, Boron-dope.ashxZylema, Jacob « Back to Equipment Page
A2, Boron-dope

A2, Boron-dope


Description

The Thermco A Furnace tube used to dope Silicon with Boron. Boron is a p-type dopant. The Thermco A resides in 1440A of the clean room of the LNF. This tool is set to be deprecated in favor of Tempress furnace S5 T3 upon its release.

Applications


Tool Documents

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