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Facility Description

"The LNF is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology." -LNF website

The facility is described at its website, and the equipment, materials, chemicals, processes and facilities used to develop devices or applications are described in this Wiki.

Clean Room

Description

The Clean room of the LNF.


General Rules

  • Rules of conduct
  • Do not bring paper/cardboard products into lab. If you need a notebook, buy one from the LNF Store.
  • Wear Gown. See Gowning page for proper procedure.

1440A


1440B


1440C


1440D


1440E


1440S


1448


1450


1348

  • Gowning Room

1480A


1480B


1480C







For Wet Chemistry Lab, See Wet Chemistry Page
© 2011 Lurie Nanofabrication Facility, University of Michigan
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