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EVG620 Bond Aligner

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Modified on 02/07/2012 04:48 PM by Getty, James Categorized as Equipment, Equipment Lithography

» EVG620 Bond Aligner (Public)

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EVG620 Bond Aligner

EVG620 Bond Aligner

Processes¶

Bonding glass and Silicon using PMMA

Tool Documents¶

SOP http://ssel-sched.eecs.umich.edu/ToolDocs/doc00051.pdf

© 2011 Lurie Nanofabrication Facility, University of Michigan

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