<= Back to Materials PageDescription of Material
Chromium is a metal
Properties
- Resistivity of Cr on glass substrates by thermal evaporation range from 20-200uΩ-cm. The crystal orientation of deposited Cr films varies depending on the method of deposition from bcc (110) or bcc (200). (1)
- In thin film Cr, reduced coordination and symmetry leads to important property differences with respect to bulk Cr. Cr (001) exhibits a surface ferromagnetic phase transition with an increase in magnetic moment of 2.49 uB (2)
Processing Tools
Deposited by
PVD using
Enerjet Sputter Coater ~500nm and the
Enerjet Evaporator ~100nm. Resistivity is influenced by substrate preparation, deposition technique, thickness of the film, substrate temperature, and post deposition annealing (see citation 1)
used in
- masks
- integrated circuits
- optical beam splitters
- magnetic recording disks
- As thin film resistors
- capacitor plates
- antimagnetic shielding material
- Cr serves as an adhesive in Pb-Sn Solder and Al in integrated circuits
- diaphragm-based MEMS applications (3)
Citations
- 1. Thin Solid Films
Volume 301, Issues 1-2, 1 June 1997, Pages 17-22 - 2. Thin Solid Films
Volume 325, Issues 1-2, 18 July 1998, Pages 201-203 - 3.Thin Solid Films
Volume 517, Issue 17, 1 July 2009, Pages 4921-4925