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Description of Material

Chromium is a metal

Properties

  • Resistivity of Cr on glass substrates by thermal evaporation range from 20-200uΩ-cm. The crystal orientation of deposited Cr films varies depending on the method of deposition from bcc (110) or bcc (200). (1)
  • In thin film Cr, reduced coordination and symmetry leads to important property differences with respect to bulk Cr. Cr (001) exhibits a surface ferromagnetic phase transition with an increase in magnetic moment of 2.49 uB (2)

Processing Tools

Deposited by PVD using Enerjet Sputter Coater ~500nm and the Enerjet Evaporator ~100nm. Resistivity is influenced by substrate preparation, deposition technique, thickness of the film, substrate temperature, and post deposition annealing (see citation 1)

Applications

used in
  • masks
  • integrated circuits
  • optical beam splitters
  • magnetic recording disks
  • As thin film resistors
  • capacitor plates
  • antimagnetic shielding material
  • Cr serves as an adhesive in Pb-Sn Solder and Al in integrated circuits
  • diaphragm-based MEMS applications (3)

Citations

  • 1. Thin Solid Films
    Volume 301, Issues 1-2, 1 June 1997, Pages 17-22
  • 2. Thin Solid Films
    Volume 325, Issues 1-2, 18 July 1998, Pages 201-203
  • 3.Thin Solid Films
    Volume 517, Issue 17, 1 July 2009, Pages 4921-4925
© 2011 Lurie Nanofabrication Facility, University of Michigan
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