Description
Ellipsometer is used to measure the
refractive index and the thickness of semi-transparent thin films. The instrument relies on the fact that the reflection at a
dielectric interface depends on the polarization of the light while the transmission of light through a transparent layer changes the phase of the incoming wave depending on the
refractive index of the material.
Specifications
Substrate material
- silicon
- gallium arsenide
- silicon on insulator
- indium phosphide
- Substrate size: 1cm – 6”
Applications
- Ellipsometer is used to measure the refractive index and the thickness of semi-transparent thin films. Important for the study of MEMS devices, enabling quantitative R&D, and failure analysis.
Tool Documents