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Pages of the Category Public.Equipment Plasma Etch

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LAM 9400 07/27/2011 01:43 PM 06/14/2013 09:59 AM gulottyOwen, KevinEquipment, Equipment Plasma Etch
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Oxford ICP RIE 07/27/2011 01:44 PM 05/17/2012 04:45 PM gulottyVanDerElzen, BrianEquipment, Equipment Plasma Etch
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Plasmatherm 790 07/27/2011 01:47 PM 12/18/2012 03:15 PM gulottyOwen, KevinEquipment, Equipment Plasma Etch
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STS Glass Etcher 07/27/2011 01:52 PM 03/10/2013 03:04 PM gulottyOwen, KevinEquipment, Equipment Plasma Etch
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Xactix XeF2 07/27/2011 01:58 PM 05/20/2013 11:24 AM gulottyOwen, KevinEquipment, Equipment Plasma Etch
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YES Plasma Stripper 10/26/2011 01:53 PM 03/10/2013 04:05 PM Owen, KevinOwen, KevinEquipment, Equipment Plasma Etch
© 2011 Lurie Nanofabrication Facility, University of Michigan
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