Search: »
Welcome Guest, you are in | Login

Pages of the Category Public.Equipment

The list of all pages contained in the current namespace.


Page Categories • Search
Page TitleCommentsCreated onModified onCreated byModified byCategories
A
A1, Sintering 07/27/2011 11:12 AM 02/07/2012 10:10 AM gulottyGetty, JamesEquipment, Equipment Annealing
A2, Boron-dope 07/27/2011 11:23 AM 04/19/2013 11:57 AM gulottyZylema, JacobEquipment, Equipment Doping
Acid Bench 1440A 08/15/2011 10:28 AM 11/04/2011 02:38 PM gulottyGetty, JamesEquipment, Equipment Wet Benches
Acid Bench 1440B 08/04/2011 03:01 PM 12/12/2011 12:06 PM gulottyOwen, KevinEquipment, Equipment Wet Benches
Acid Bench 1440C 08/04/2011 05:35 PM 12/12/2011 11:59 AM gulottyOwen, KevinEquipment, Equipment Wet Benches
ACS 200 cluster tool 07/27/2011 11:24 AM 02/07/2012 10:52 AM gulottyGetty, JamesEquipment, Equipment Lithography
ADT 7100 Dicing Saw 07/27/2011 02:52 PM 05/02/2013 11:36 AM gulottySostrom, StevenEquipment, Equipment Dicing, Equipment Packaging, Equipment Wet Chemistry
Alessi probe station 07/27/2011 02:37 PM 08/08/2011 09:07 PM gulottygulottyEquipment, Equipment Metrology
AutoEL Ellipsometer 07/27/2011 01:03 PM 04/04/2012 03:09 PM gulottyArmstrong, BrianEquipment, Equipment Metrology
B
Base Bench 07/27/2011 03:07 PM 08/08/2011 09:18 PM gulottygulottyEquipment, Equipment Wet Benches, Equipment Wet Chemistry
Base Bench 1440B 08/14/2011 03:13 PM 06/18/2013 12:01 PM gulottyOwen, KevinEquipment, Equipment Wet Benches
Bottle Rinse Station 08/04/2011 03:28 PM 08/09/2011 01:52 PM gulottygulottyEquipment, Facilities
C
CEE 100CB Spinner 07/29/2011 01:59 PM 06/12/2013 11:06 AM gulottyWright, ShawnEquipment, Equipment Lithography
CL200 Megasonic Cleaner 07/27/2011 02:15 PM 08/08/2011 08:54 PM gulottygulottyEquipment, Equipment Wafer Bonding
CMP IPEC-472 07/27/2011 02:58 PM 07/30/2012 02:19 PM gulottyHerrera-Fierro, PilarEquipment, Equipment Wet Chemistry, Polishing
Cooke Evaporator 07/27/2011 02:01 PM 12/06/2011 06:25 PM gulottyslaurilaEquipment, Equipment PVD
D
Dektak XT Surface Profilometer 05/28/2013 02:27 PM 05/29/2013 03:14 PM Armstrong, BrianArmstrong, BrianEquipment, Equipment Metrology
Denton Explorer-14 08/14/2011 07:06 PM 08/15/2011 09:55 AM gulottygulottyEquipment, Equipment PVD
E
EnerJet Evaporator 07/27/2011 02:03 PM 04/25/2013 10:43 AM gulottyOonk, MatthewEquipment, Equipment PVD
EnerJet Sputter Coater 07/27/2011 02:04 PM 12/06/2011 06:36 PM gulottyslaurilaEquipment, Equipment PVD
Equipment 07/27/2011 11:01 AM 06/13/2013 10:57 AM gulottyBeach, KatharineEquipment
EVG501s bonder 07/27/2011 02:17 PM 08/14/2011 06:26 PM gulottygulottyEquipment, Equipment Wafer Bonding
EVG620 Bond Aligner 07/27/2011 11:25 AM 02/07/2012 04:48 PM gulottyGetty, JamesEquipment, Equipment Lithography
F
Flexus 2320-S 07/27/2011 01:06 PM 05/23/2013 02:22 PM gulottyArmstrong, BrianEquipment, Equipment Metrology
G
GCA AS200 AutoStep 07/27/2011 11:27 AM 05/02/2013 11:24 AM gulottyWang, NadineEquipment, Equipment Lithography
Gold Plating Station 07/27/2011 02:00 PM 08/15/2011 11:27 AM gulottygulottyEquipment, Equipment Plating, Equipment Wet Chemistry
GSI PECVD 07/27/2011 01:41 PM 04/22/2013 04:37 PM gulottySebastian, AnthonyEquipment, Equipment PECVD
H
Headway Spinner 07/29/2011 04:04 PM 08/08/2011 08:23 PM gulottygulottyEquipment, Equipment Lithography
Heidelberg uPG 501 01/24/2013 08:00 PM 06/15/2013 08:16 PM Thompson, KyleKnisely, KatherineAnnouncements, Equipment, Equipment Lithography
Height Gauge 07/27/2011 03:04 PM 08/08/2011 08:35 PM gulottygulottyEquipment, Equipment Metrology
Hot Plate 07/29/2011 11:27 AM 08/14/2011 06:25 PM gulottygulottyEquipment, Processes, Processes Wafer Mounting
HP4145 Parametric Analyzer 07/27/2011 02:48 PM 08/09/2011 02:30 PM gulottygulottyEquipment, Equipment Metrology
J
JetFirst-100 Forming 07/27/2011 11:17 AM 02/07/2012 10:12 AM gulottyGetty, JamesEquipment, Equipment Annealing
JetFirst-150 RTP 07/27/2011 11:18 AM 02/07/2012 10:13 AM gulottyGetty, JamesEquipment, Equipment Annealing
K
Keithley 4200-1 07/27/2011 02:49 PM 08/08/2011 09:09 PM gulottygulottyEquipment, Equipment Metrology
Keithley 4200-2 07/27/2011 02:50 PM 08/08/2011 09:09 PM gulottygulottyEquipment, Equipment Metrology
L
Lab18_01 07/27/2011 02:06 PM 04/09/2013 04:24 PM gulottyHicks, BrianEquipment, Equipment PVD
Lab18-02 07/27/2011 02:07 PM 04/25/2013 10:43 AM gulottySebastian, DavidEquipment, Equipment PVD
LAM 9400 07/27/2011 01:43 PM 06/14/2013 09:59 AM gulottyOwen, KevinEquipment, Equipment Plasma Etch
Lapper 07/27/2011 03:02 PM 04/24/2012 10:21 AM gulottyHerrera-Fierro, PilarEquipment, Equipment Wet Chemistry, Polishing
M
MA 1006 Dicing Saw 07/27/2011 02:53 PM 08/08/2011 09:11 PM gulottygulottyEquipment, Equipment Dicing, Equipment Packaging, Equipment Wet Chemistry
MA/BA-6 Mask/Bond Aligner 07/29/2011 12:51 PM 02/07/2012 04:54 PM gulottyGetty, JamesEquipment, Equipment Lithography
MA6 Mask Aligner 07/27/2011 12:25 PM 02/07/2012 04:56 PM gulottyGetty, JamesEquipment, Equipment Lithography
Manual Spinner 07/29/2011 04:02 PM 12/31/2012 12:18 PM gulottyOwen, KevinEquipment, Equipment Lithography
Mask Clean Bench 1440A 08/04/2011 04:24 PM 12/12/2011 12:10 PM gulottyOwen, KevinEquipment, Equipment Wet Benches
Mask Maker 07/27/2011 12:28 PM 02/07/2012 05:16 PM gulottyGetty, JamesEquipment, Equipment Lithography, Equipment Mask Maker
S
S6 T1 - Anneal III-V Material 07/27/2011 11:15 AM 06/14/2013 02:57 PM gulottyZylema, JacobEquipment, Equipment Annealing, Equipment Furnaces
S6 T2 - Nitride-HTO-OxyNitride 07/27/2011 12:34 PM 06/05/2013 02:32 PM gulottyZylema, JacobEquipment, Equipment LPCVD
S6 T3 - CVD Poly 07/27/2011 12:36 PM 04/19/2013 11:29 AM gulottyZylema, JacobEquipment, Equipment LPCVD
S6 T4 - LTO (some metals allowed) 07/27/2011 12:37 PM 06/14/2013 02:58 PM gulottyZylema, JacobEquipment, Equipment LPCVD
© 2011 Lurie Nanofabrication Facility, University of Michigan
PoweredBy