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1440C

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Modified on 11/27/2012 03:55 PM by Zylema, Jacob Categorized as Facilities

» 1440C (Public)

Description¶

The following is the processes and equipment used in this room, colloquially referred to as the GaAs bay.

Equipment¶

Processes¶

Acid Bench¶

Solvent Bench¶

Base Bench¶

KOH etch (mainly for SiGe process)

© 2011 Lurie Nanofabrication Facility, University of Michigan

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